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Masami Urano
Masami Urano
Nippon Telegraph and Telephone
Microelectromechanical systems
Electronic engineering
Fabrication
Optoelectronics
Electrode
8
Papers
52
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Novel Structure and Fabrication Process for Integrated RF Microelectromechanical-System Technology
2006
Japanese Journal of Applied Physics
Kei Kuwabara
Masami Urano
Junichi Kodate
Norio Sato
Hiroki Morimura
Tomomi Sakata
Hiromu Ishii
Toshikazu Kamei
Kazuhisa Kudou
Masaki Yano
Katsuyuki Machida
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Citations (13)
Novel Packaging Technology for Microelectromechanical-System Devices
2005
Japanese Journal of Applied Physics
Masami Urano
Tomomi Sakata
Toshishige Shimamura
Hiromu Ishii
Mitsuru Chino
Teruo Shimada
Hiroshi Tazawa
Katsuyuki Machida
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Citations (6)
A 6-bit A/D Converter for MEMS-control circuit
2005
The Japan Society of Applied Physics
Jun Terada
Masami Urano
Junichi Kodate
Shin Ichiro Mutoh
Katsuyuki Machida
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Integrated RF-MEMS Technology with Wafer-Level Encapsulation
2005
The Japan Society of Applied Physics
Kei Kuwabara
Masami Urano
Junichi Kodate
Norio Sato
Tomomi Sakata
Hiromu Ishii
Toshikazu Kamei
Kazuhisa Kudou
Masaki Yano
Katsuyuki Machida
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Citations (2)
Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes
2004
Japanese Journal of Applied Physics
Hiromu Ishii
Masami Urano
Yasuyuki Tanabe
Toshishige Shimamura
Joji Yamaguchi
Toshikazu Kamei
Kazuhisa Kudou
Masaki Yano
Yuji Uenishi
Katsuyuki Machida
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Citations (12)
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