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Toshihiko Kumazaki
Toshihiko Kumazaki
Electronic engineering
Fabrication
Passivation
Electrostatic discharge
Fingerprint recognition
4
Papers
64
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Effect of Scratch Stress on the Surface Hardness and Inner Structures of a Capacitive Fingerprint Sensor LSI
2007
IRPS | International Reliability Physics Symposium
Nobuhiro Shimoyama
S. Shigematsu
Hiroki Morimura
T. Shimamura
Toshihiko Kumazaki
Mamoru Nakanishi
Hiromu Ishii
Katsuyuki Machida
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Citations (4)
A novel semiconductor capacitive sensor for a single-chip fingerprint sensor/identifier LSI
2001
IEEE Transactions on Electron Devices
Katsuyuki Machida
Satoshi Shigematsu
Hiroki Morimura
Yasuyuki Tanabe
Norio Sato
Nobuhiro Shimoyama
Toshihiko Kumazaki
Kazuhisa Kudou
Masaki Yano
Hakaru Kyuragi
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Citations (38)
A thick-Cu process for add-on interconnections using photosensitive varnish for thick interlayer dielectric
2000
IITC | International Interconnect Technology Conference
Kunio Saito
Takashi Kosugi
Shouji Yagi
Chikara Yamaguchi
Kazuhisa Kudo
Masaki Yano
Toshihiko Kumazaki
Makoto Yaita
Hiromu Ishii
Katsuyuki Machida
Hakaru Kyuragi
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Citations (3)
A new sensor structure and fabrication process for a single-chip fingerprint sensor/identifier LSI
1999
IEDM | International Electron Devices Meeting
Katsuyuki Machida
S. Shigematsu
Hiroki Morimura
Nobuhiro Shimoyama
Yasuyuki Tanabe
Toshihiko Kumazaki
Kazuhisa Kudou
Masaki Yano
Hakaru Kyuragi
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Citations (19)
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