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Chao-Yu Cheng
Chao-Yu Cheng
Optoelectronics
Materials science
Ellipsometry
Analytical chemistry
spectroscopic ellipsometry
5
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2
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0
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2024
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Advanced Inspection Methodology for the Maximum Extension of Nitride Test Wafer Recycling
2020
ASMC | Advanced Semiconductor Manufacturing Conference
Yu-Yuan Ke
Kuang-Hsiu Chen
Shin-Ru Chen
Guan-wei Huang
Wesley Yu
Po-Jen Chuang
Chun-Li Lin
Chih-Wei Huang
Jun-Ming Chen
Shao-Ju Chang
Nachiketa Janardan
Tung-Ying Lee
Ethan Chen
Chao-Yu Cheng
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Fast and accurate defect classification for CMP process monitoring
2019
ASMC | Advanced Semiconductor Manufacturing Conference
Yong-Yi Lin
Fu-shou Tsai
Li Chieh Hsu
Hsin Kuo Hsu
Chih-Yueh Li
Yu-Yuan Ke
Chih-Wei Huang
Jun Ming Chen
Shao-Ju Chang
Tung-Ying Lee
Ethan Chen
Chao-Yu Cheng
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Fast and Accurate in-Line Monitor of Boron Implantation Energy and Dose by Spectroscopic Ellipsometry
2014
Tsai-Yu Wen
Tsuo-Wen Lu
Yu-Ren Wang
Chin-Fu Lin
J.Y. Wu
Shao-Ju Chang
Sheng-Min Chiu
Chien-Jen Huang
Chao-Yu Cheng
Juli Cheng
Getin Raphael
Zhiming Jiang
Zhengquan Tan
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Advanced Spectroscopic Ellipsometry Application for Multi-Layers SiGe at 28nm Node and Beyond
2013
Teng Chun Hsuan
Yi-cheng Hu
Ming Chih Hsu
Dian-Zhen Zhan
Stan Yu
Chin Cheng Chien
Shao-Ju Chang
Sheng-Min Chiu
Chien-Jen Huang
Chao-Yu Cheng
Juli Cheng
Getin Raphael
Zhiming Jiang
Ygartua Carlos
Zhengquan Tan
Ray Hoobler
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Fast and Accurate in-Line Monitor of Boron Implantation Energy and Dose by Spectroscopic Ellipsometry
2006
Tsai-Yu Wen
Tsuo-Wen Lu
Yu-Ren Wang
Chin Fu Lin
Juan-Yuan Wu
Shao-Ju Chang
Sheng-Min Chiu
Chien-Jen Huang
Chao-Yu Cheng
Juli Cheng
Getin Raphael
Zhiming Jiang
Zhengquan Tan
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