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Fu-shou Tsai
Fu-shou Tsai
United Microelectronics Corporation
Chemical-mechanical planarization
Electronic engineering
Optoelectronics
Leakage (electronics)
Amorphous silicon
2
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2024
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Fast and accurate defect classification for CMP process monitoring
2019
ASMC | Advanced Semiconductor Manufacturing Conference
Yong-Yi Lin
Fu-shou Tsai
Li Chieh Hsu
Hsin Kuo Hsu
Chih-Yueh Li
Yu-Yuan Ke
Chih-Wei Huang
Jun Ming Chen
Shao-Ju Chang
Tung-Ying Lee
Ethan Chen
Chao-Yu Cheng
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The Amorphous-Si CMP process improvement for L14 nm FinFET technology node
2014
Yu-Ting Li
Po-Cheng Huang
Fu-shou Tsai
Kun-ju Li
C. H. Lin
Z. J. Lin
Y. L. Liu
W. S. Sie
S. K. Hsu
Y. M. Lin
Wen-Chin Lin
Chuan Liu
J. F. Lin
J.Y. Wu
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