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Hisayasu Nishino
Hisayasu Nishino
Optics
Chip
Electron-beam lithography
Dynamic random-access memory
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2
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7
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Electron‐beam block exposure system for a 256 M dynamic random access memory
1993
Journal of Vacuum Science & Technology B
Kiichi Sakamoto
Shunsuke Fueki
Satoru Yamazaki
Tomohiko Abe
Katsuhiko Kobayashi
Hisayasu Nishino
Takamasa Satoh
A. Takemoto
A. Ookura
M. Oono
S. Sago
Yoshihisa Oae
Akio Yamada
Hiroshi Yasuda
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Citations (4)
Electron Beam Block Exposure System for 256 M Dynamic Random Access Memory Lithography
1993
Japanese Journal of Applied Physics
Kiichi Sakamoto
Shunsuke Fueki
Satoru Yamazaki
Tomohiko Abe
Katsuhiko Kobayashi
Hisayasu Nishino
Takamasa Satoh
Akio Takemoto
Akio Ookura
Manabu Ohno
Satoru Sagoh
Yoshihisa Oae
Akio Yamada
Junichi Kai
Hiroshi Yasuda
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Citations (3)
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