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Satoru Sagoh
Satoru Sagoh
Electron-beam lithography
Optics
Physics
Dram
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2
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7
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Repetitive One-Tenth Micron Pattern Fabrication Using An EB Block Exposure System
1994
Japanese Journal of Applied Physics
Akio Yamada
Kiichi Sakamoto
Satoru Yamazaki
Katsuhiko Kobayashi
Satoru Sagoh
Manabu Ohno
Hitoshi Watanabe
Hiroshi Yasuda
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Citations (4)
Electron Beam Block Exposure System for 256 M Dynamic Random Access Memory Lithography
1993
Japanese Journal of Applied Physics
Kiichi Sakamoto
Shunsuke Fueki
Satoru Yamazaki
Tomohiko Abe
Katsuhiko Kobayashi
Hisayasu Nishino
Takamasa Satoh
Akio Takemoto
Akio Ookura
Manabu Ohno
Satoru Sagoh
Yoshihisa Oae
Akio Yamada
Junichi Kai
Hiroshi Yasuda
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Citations (3)
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