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S. Sago
S. Sago
Optics
Masking (art)
Beam (structure)
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Chemistry
2
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4
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Deflector and correction coil calibrations in an electron beam block exposure system
1994
Journal of Vacuum Science & Technology B
Akio Yamada
Kiichi Sakamoto
Satoru Yamazaki
Katsuhiko Kobayashi
S. Sago
M. Oono
H. Watanabe
Hiroshi Yasuda
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Electron‐beam block exposure system for a 256 M dynamic random access memory
1993
Journal of Vacuum Science & Technology B
Kiichi Sakamoto
Shunsuke Fueki
Satoru Yamazaki
Tomohiko Abe
Katsuhiko Kobayashi
Hisayasu Nishino
Takamasa Satoh
A. Takemoto
A. Ookura
M. Oono
S. Sago
Yoshihisa Oae
Akio Yamada
Hiroshi Yasuda
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Citations (4)
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