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dagurasu ee junia buffubaagaa
dagurasu ee junia buffubaagaa
Materials science
Electronic engineering
Dielectric
Busbar
Metal
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An electrostatic chuck having a zone that is thermally separated with minimal crosstalk
2014
bijai dii parukii
konsutantein mafuratyefu
roosa zieison dera
noorubakusyu hamido
hamido noorubakusyu
buraddo eru meizu
dagurasu ee junia buffubaagaa
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The electrostatic chuck having the uniformity of high rf and temperature
2013
dimitorii rubomirusukii
zienifu aa wai san
maaku marukobusukii
konsutantein makuratosiebu
dagurasu ee junia buffubaagaa
seima banna
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Workpiece support for a plasma reactor having a controlled rf power distribution to the process kit ring
2009
kenesu esu korinzu
zienifu aa wai san
meifu a sien
andoryuu nuguen
dagurasu ee junia buffubaagaa
syahido raufu
kaateiku ramasuwamii
tosuten bii riru
kou ni hanawa
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