Old Web
English
Sign In
Acemap
>
authorDetail
>
buraddo eru meizu
buraddo eru meizu
Feed forward
Plasma processing
Temperature control
Plasma
Control theory
2
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
An electrostatic chuck having a zone that is thermally separated with minimal crosstalk
2014
bijai dii parukii
konsutantein mafuratyefu
roosa zieison dera
noorubakusyu hamido
hamido noorubakusyu
buraddo eru meizu
dagurasu ee junia buffubaagaa
Show All
Source
Cite
Save
Citations (0)
Feedforward temperature control of the plasma processing apparatus
2010
tyetan mahadesuwarasuwaami
uorutaa aaru merii
seruzio fukuda syoozi
tyunrii tyan
yasyasuvini pataaru
doui dii guen
teina tuon
sieen sii neviru
dagurasu ei junia buffubaagaa
ferunando emu siruveira
buraddo eru meizu
kaaruteiku ramasuwaami
hamido nuurubafusyu
Show All
Source
Cite
Save
Citations (0)
1