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kenesu esu korinzu
kenesu esu korinzu
Materials science
Plasma
Coating
Electronic engineering
plasma reactor
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Symmetric inductively coupled plasma source having a coaxial rf feed and the coaxial shield
2013
zieison ee kenii
zieemuzu dii karudoutti
kenesu esu korinzu
rityaado foberu
kaateiku ramasuwamii
syahido raufu
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Plasma reactor having a tiltable overhead rf inductive source
2010
kenesu esu korinzu
andoryuu nuguen
ziefurii maatein sarinasu
imado yuusifu
min syu
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Protective coating resistant to reactive plasma treatment
2009
kenesu esu korinzu
zienifu aa wai san
ren guan deyuan
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Yttrium-containing ceramic coatings resistant to reducing plasma
2009
zienifu aa wai san
syaomingu hii
kenesu esu korinzu
toomasu gurabesu
sen sati
yuan zie
zie yuan
rii syuu
renguan guan
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The method of coating a semiconductor processing apparatus according to the yttrium-containing protective coating
2008
zienifu aa wai san
sen sati
zimu denpusutaa
rii syuu
kenesu esu korinzu
renguan deyuan
toomasu gurabesu
syaomingu hii
ziee yuan
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