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syahido raufu
syahido raufu
Plasma
Materials science
Electronic engineering
Optoelectronics
plasma reactor
3
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Symmetric inductively coupled plasma source having a coaxial rf feed and the coaxial shield
2013
zieison ee kenii
zieemuzu dii karudoutti
kenesu esu korinzu
rityaado foberu
kaateiku ramasuwamii
syahido raufu
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Workpiece support for a plasma reactor having a controlled rf power distribution to the process kit ring
2009
kenesu esu korinzu
zienifu aa wai san
meifu a sien
andoryuu nuguen
dagurasu ee junia buffubaagaa
syahido raufu
kaateiku ramasuwamii
tosuten bii riru
kou ni hanawa
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Method and apparatus for removing polymer from the wafer backside and edges
2008
ziefurii maatin sarinasu
antyeru sieinaa
azito barakurisyuna
nansii fu a ngu
uorutaa aaru merii
imado yuusefu
syahido raufu
ingu rui
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