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Carine Alaerts
Carine Alaerts
Katholieke Universiteit Leuven
Materials science
Dielectric
Metallurgy
Copper interconnect
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5
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13
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Damascene integration feasability of porous SiLK resin films
2001
Joost Waeterloos
Herbert Struyf
Joke Van Aelst
Arabinda Das
Rudy Caluwaerts
Carine Alaerts
Werner Boullart
Zsolt Tokei
Marleen Van Hove
Karen Maex
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Integration feasibility of porous SiLK* semiconductor dielectric
2001
IITC | International Interconnect Technology Conference
Joost Waeterloos
Herbert Struyf
J. Van Aelst
D.W. Castillo
S. Lucero
Rudy Caluwaerts
Carine Alaerts
G. Mannaert
W. Boullart
Erik Sleeckx
Marc Schaekers
Z. Tokel
Iwan Vervoort
Jan Van Steenbergen
Bram Sijmus
Ingrid Vos
Marc Meuris
Francesca Iacopi
R. A Donaton
M. Van Hove
Serge Vanhaelemeersch
Karen Maex
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Dry etching of low k materials
1999
IITC | International Interconnect Technology Conference
Serge Vanhaelemeersch
Carine Alaerts
M. R. Baklanov
Herbert Struyf
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Plasma etching of organic low-dielectric-constant polymers: comparative analysis
1998
MRS Proceedings
Mikhail R. Baklanov
Serge Vanhaelemeersch
Carine Alaerts
Karen Maex
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Post dry-etch cleaning issues of an organic low-K dielectric
1998
Solid State Phenomena
Filip Lanckmans
Mikhail R. Baklanov
Carine Alaerts
Serge Vanhaelemeersch
Karen Maex
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Citations (4)
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