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Post dry-etch cleaning issues of an organic low-K dielectric
Post dry-etch cleaning issues of an organic low-K dielectric
1998
Filip Lanckmans
Mikhail R. Baklanov
Carine Alaerts
Serge Vanhaelemeersch
Karen Maex
Keywords:
Dry etching
Composite material
Metallurgy
Low-k dielectric
Materials science
Residue (complex analysis)
Correction
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