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Damascene integration feasability of porous SiLK resin films
Damascene integration feasability of porous SiLK resin films
2001
Joost Waeterloos
Herbert Struyf
Joke Van Aelst
Arabinda Das
Rudy Caluwaerts
Carine Alaerts
Werner Boullart
Zsolt Tokei
Marleen Van Hove
Karen Maex
Keywords:
Porosity
Copper interconnect
Composite material
Polymer chemistry
Materials science
SILK
Correction
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