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Rochelle Rena
Rochelle Rena
Spectral density
Surface finish
Resist
Optics
Materials science
3
Papers
8
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Roughness power spectral density as a function of aerial image and basic process/resist parameter
2019
Charlotte Cutler
Choong-Bong Lee
James W. Thackeray
John Nelson
Jason DeSisto
Rochelle Rena
Peter Trefonas
Chris A. Mack
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Utilizing Roughness Power Spectral Density Variables to Guide Resist Formulation and Understand Impact of Frequency Analysis through Process
2018
Journal of Photopolymer Science and Technology
Charlotte Cutler
Choong-Bong Lee
James W. Thackeray
Chris A. Mack
John Nelson
Jason DeSisto
Mingqi Li
Emad Aqad
Xisen Hou
Tomas Marangoni
Joshua Kaitz
Rochelle Rena
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Citations (2)
Roughness power spectral density as a function of resist parameters and its impact through process
2018
Charlotte Cutler
James W. Thackeray
Jason DeSisto
Choong-Bong Lee
Mingqi Li
Emad Aqad
Xisen Hou
Tomas Marangoni
Joshua Kaitz
Rochelle Rena
Chris A. Mack
John Nelson
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Citations (6)
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