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M. Rouillay

Centre national de la recherche scientifique

4

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Microgrippers fabricated by the LIGA technique

1997 Sensors and Actuators A-physical
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Microgrippers realized by LIGA techniques

1995 ETFA | Emerging Technologies and Factory Automation
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Deep etch X-ray lithography using silicon-gold masks fabricated by deep etch UV lithography and electroforming

1995 Journal of Micromechanics and Microengineering
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Deep etch lithography at LURE-D.C.I. storage ring

1994 Journal De Physique Iv
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