Microgrippers fabricated by the LIGA technique

A study devoted to the design and fabrication of microgrippers using the LIGA technique is described in this paper. The design method is presented and validated by the use of finite-element analysis. Technological topics are detailed to illustrate the fabrication process. Also, experimental data concerning the mechanical behaviour of one of the microgrippers are reported. These data are used to improve the previous finite-element analysis. Finally, a comparison between experiments and theoretical predictions is discussed.