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Matsuzaki Hidefumi
Matsuzaki Hidefumi
2
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H支援プラズマ化学蒸着により蒸着した炭素膜のH 2 /N 2 プラズマエッチング率
2013
Japanese Journal of Applied Physics
Urakawa Tatsuya
Torigoe Ryuhei
Matsuzaki Hidefumi
Yamashita Daisuke
Uchida Giichiro
Koga Kazunori
Shiratani Masaharu
Setsuhara Yuichi
Takeda Keigo
Sekine Makoto
Hori Masaru
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SiH 4 +B 10 H 14 マルチホロー放電プラズマ化学蒸着を用いた無クラスタBドープ水素化非晶質珪素膜の蒸着
2012
Japanese Journal of Applied Physics
Koga Kazunori
Nakahara Kenta
Kim Yeon-Won
Matsunaga Takeaki
Yamashita Daisuke
Matsuzaki Hidefumi
Uchida Giichiro
Kamataki Kunihiro
Itagaki Naho
Shiratani Masaharu
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Citations (4)
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