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Kim Yeon-Won
Kim Yeon-Won
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リモートシランプラズマにおける粒子挙動とその膜成長への寄与【JST・京大機械翻訳】
2018
Journal of Vacuum Science and Technology
Kim Yeon-Won
Koga Kazunori
Shiratani Masaharu
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SiH 4 +B 10 H 14 マルチホロー放電プラズマ化学蒸着を用いた無クラスタBドープ水素化非晶質珪素膜の蒸着
2012
Japanese Journal of Applied Physics
Koga Kazunori
Nakahara Kenta
Kim Yeon-Won
Matsunaga Takeaki
Yamashita Daisuke
Matsuzaki Hidefumi
Uchida Giichiro
Kamataki Kunihiro
Itagaki Naho
Shiratani Masaharu
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