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Manfred Lacher

Carl Zeiss AG

37

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594

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Nanostructured probes for scanning near-field optical microscopy

1999 Nanotechnology
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Electrostatically operated micromirrors for Hadamard transform spectrometer

1999 IEEE Journal of Selected Topics in Quantum Electronics
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Novel concepts and technologies for manufacturing optical microdevices

1998
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Microfabrication of new sensors for scanning probe microscopy

1998 Journal of Micromechanics and Microengineering
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A process for producing a body having microstructures of thermally aufgespritzem material

1998
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Micromachined aperture probe tip for multifunctional scanning probe microscopy

1998 Ultramicroscopy
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Microsystem technology between research and industrial application

1998 Microelectronic Engineering
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Integrated Fabry–Pérot distance control for atomic force microscopy

1997 Journal of Vacuum Science & Technology B
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A label-free affinity sensor with compensation of unspecific protein interaction by a highly sensitive integrated optical Mach–Zehnder interferometer on silicon

1997 Sensors and Actuators B-chemical
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Micromachined aperture probe tip for multifunctional scanning probe microscopy

1997
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