A process for producing a body having microstructures of thermally aufgespritzem material

1998 
Methods for producing microstructure bodies are known in which a metallic or ceramic powder comprising an organic binding system is used. The microstructure bodies obtained in such a manner comprise a comparatively low precision due to the volume shrinkage which occurs during debinding. The aim of the invention is to provide a method which is effective without the use of binding systems and which makes it possible to obtain a precision in the lower micrometer and submicrometer range. To this end, a method is provided in which a layer of a radiosensitive plastic is firstly deposited on a substrate surface (10) and is microstructured using a lithographic method. At least one material (14) is deposited onto the microstructured plastic layer (11) obtained in such a manner by means of thermal spraying. Lastly, the plastic layer and/or the substrate are/is completely or partially removed. It is also possible to remove the material applied by spraying at least up to the height of the top edge of microstructures of the plastic layer. Metallic and ceramic microstructure bodies can be obtained with high precision by using this method.
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