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G. R. Bogart
G. R. Bogart
Plasma
Plasma-enhanced chemical vapor deposition
Materials science
Inorganic chemistry
Deposition (law)
6
Papers
222
Citations
0.01
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In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
2008
Sensors and Actuators A-physical
Uma Krishnamoorthy
Roy H. Olsson
G. R. Bogart
Michael S. Baker
Dustin W. Carr
Thomas P. Swiler
Peggy J. Clews
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Citations (119)
Deposition of SiO2 films from novel alkoxysilane/O2 plasmas
1998
Journal of Vacuum Science and Technology
K. H. A. Bogart
S. K. Ramirez
L. A. Gonzales
G. R. Bogart
Ellen R. Fisher
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Citations (28)
Deposition of SiO 2 films from novel alkoxysilane/O 2 plasmas
1998
K. H. A. Bogart
S. K. Ramirez
L. A. Gonzales
G. R. Bogart
Ellen R. Fisher
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Citations (3)
Plasma enhanced chemical vapor deposition of SiO 2 using novel alkoxysilane precursors
1995
K. H. A. Bogart
Nathan F. Dalleska
G. R. Bogart
Ellen R. Fisher
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Citations (1)
Plasma enhanced chemical vapor deposition of SiO_2 using novel alkoxysilane precursors
1995
K. H. A. Bogart
Nathan F. Dalleska
G. R. Bogart
Ellen R. Fisher
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Citations (0)
Plasma enhanced chemical vapor deposition of SiO2 using novel alkoxysilane precursors
1995
Journal of Vacuum Science and Technology
K. H. A. Bogart
Nathan F. Dalleska
G. R. Bogart
Ellen R. Fisher
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Citations (71)
1