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Deposition of SiO 2 films from novel alkoxysilane/O 2 plasmas
Deposition of SiO 2 films from novel alkoxysilane/O 2 plasmas
1998
K. H. A. Bogart
S. K. Ramirez
L. A. Gonzales
G. R. Bogart
Ellen R. Fisher
Keywords:
Plasma
Deposition (law)
Materials science
Chemical engineering
Correction
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