Old Web
English
Sign In
Acemap
>
authorDetail
>
Edward E. Remsen
Edward E. Remsen
Fumed silica
Particle
Chemical-mechanical planarization
Slurry
Oxide
2
Papers
62
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMP
2006
Journal of The Electrochemical Society
Edward E. Remsen
Sriram Anjur
David Boldridge
Mungai Kamiti
Shoutian Li
Timothy Johns
Charles Dowell
Jaishankar Kasthurirangan
Paul M. Feeney
Show All
Source
Cite
Save
Citations (57)
Correlation of Defects on Dielectric Surfaces with Large Particle Counts in Chemical-Mechanical Planarization (CMP) Slurries Using a New Single Particle Optical Sensing (SPOS) Technique
2005
Edward E. Remsen
Sriram Anjur
David Boldridge
Mungai Kamiti
Shoutian Li
Show All
Source
Cite
Save
Citations (5)
1