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Jaishankar Kasthurirangan
Jaishankar Kasthurirangan
Chemistry
Chemical-mechanical planarization
Metallurgy
Stress (mechanics)
Microstructure
4
Papers
94
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Brittle and Ductile Fracture Mechanics Analysis of Surface Damage Caused During CMP
2007
Journal of The Electrochemical Society
Terry A. Ring
Paul M. Feeney
David Boldridge
Jaishankar Kasthurirangan
Shoutian Li
James A. Dirksen
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Citations (35)
Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMP
2006
Journal of The Electrochemical Society
Edward E. Remsen
Sriram Anjur
David Boldridge
Mungai Kamiti
Shoutian Li
Timothy Johns
Charles Dowell
Jaishankar Kasthurirangan
Paul M. Feeney
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Citations (57)
Thermal stress and microstructure in Al(Cu) and Cu interconnects for advanced ULSI applications
1998
Jaishankar Kasthurirangan
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Citations (1)
Thermal stress and microstructure in Al(Cu) and Cu interconnects for advanced ULSI applications
1998
Jaishankar Kasthurirangan
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