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Kazumi Noda
Kazumi Noda
East Tennessee State University
Immersion lithography
Materials science
X-ray lithography
Ellipsometry
Photochemistry
2
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2
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0
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The Photopolymer Science and Technology Award
2009
Journal of Photopolymer Science and Technology
Dario L. Goldfarb
Libor Vylicky
Sean D. Burns
Karen Petrillo
John C. Arnold
Anthony D. Lisi
Dirk Pfeiffer
Daniel P. Sanders
Robert D. Allen
David R. Medeiros
Dah-Chung Owe-Yang
Kazumi Noda
Seiichiro Tachibana
Shozo Shirai
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Graded Spin-on Organic Bottom Antireflective Coating for High NA Immersion Lithography
2008
Journal of Photopolymer Science and Technology
Dario L. Goldfarb
Libor Vyklicky
Sean D. Burns
Karen Petrillo
John C. Arnold
Anthony D. Lisi
Dirk Pfeiffer
Daniel D. Sanders
Robert D. Allen
David R. Medeiros
Dah-Chung Owe-Yang
Kazumi Noda
Seiichiro Tachiban
Shozo Shirai
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Citations (2)
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