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C.L. Weng
C.L. Weng
United Microelectronics Corporation
NMOS logic
Dimer
Ion implantation
CMOS
Bipolar junction transistor
2
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Arsenic Dimer Implants for Shallow Extension in 0.13μm Logic Devices
2003
Bill Chang
Michael A. Graf
Jonathan Chang
Anupriya Agarwal
Mike Ameen
R.N. Reece
H.I. Chen
Derrick Chien
C.C. Tsai
Mingsheng Tsai
C.L. Weng
D. Y. Wu
Chen-Lin Yang
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Arsenic dimer implants for shallow extension in 0.13amu;m logic devices
2002
Bill Chang
Jonathan Chang
A. Agarwal
M.S. Ameen
R.N. Reece
H.I. Chen
D. Chien
C.C. Tsai
M. Tsai
C.L. Weng
D. Y. Wu
C. K. Yang
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