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Chen-Lin Yang
Chen-Lin Yang
Ion implantation
NMOS logic
Dimer
Sheet resistance
Transistor
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Arsenic Dimer Implants for Shallow Extension in 0.13μm Logic Devices
2003
Bill Chang
Michael A. Graf
Jonathan Chang
Anupriya Agarwal
Mike Ameen
R.N. Reece
H.I. Chen
Derrick Chien
C.C. Tsai
Mingsheng Tsai
C.L. Weng
D. Y. Wu
Chen-Lin Yang
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