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C. K. Yang
C. K. Yang
United Microelectronics Corporation
Ion implantation
Doping
Silicon
Optoelectronics
NMOS logic
2
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19
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Arsenic dimer implants for shallow extension in 0.13amu;m logic devices
2002
Bill Chang
Jonathan Chang
A. Agarwal
M.S. Ameen
R.N. Reece
H.I. Chen
D. Chien
C.C. Tsai
M. Tsai
C.L. Weng
D. Y. Wu
C. K. Yang
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Evolution of structural order in germanium ion-implanted amorphous silicon layers
2002
Journal of Applied Physics
S. L. Cheng
H.H. Lin
Jr-Hau He
T.F. Chiang
C. H. Yu
L. J. Chen
C. K. Yang
D. Y. Wu
S. C. Chien
W.C. Chen
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Citations (19)
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