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M. Tsai
M. Tsai
United Microelectronics Corporation
NMOS logic
Dimer
Ion implantation
CMOS
Bipolar junction transistor
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Arsenic dimer implants for shallow extension in 0.13amu;m logic devices
2002
Bill Chang
Jonathan Chang
A. Agarwal
M.S. Ameen
R.N. Reece
H.I. Chen
D. Chien
C.C. Tsai
M. Tsai
C.L. Weng
D. Y. Wu
C. K. Yang
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