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Hiroki Murooka
Hiroki Murooka
Eaton Corporation
Materials science
Ion implantation
Wafer
Ion
Atomic physics
7
Papers
21
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Momentum Transfer Implantation for Sidewall Doping of FinFET's
2010
The Japan Society of Applied Physics
Genshu Fuse
Michiro Sugitani
Hiroshi Matsushita
Hiroki Murooka
Masashi Kuriyama
Masaru Tanaka
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Introduction of the SHX‐III System, a Single‐Wafer High‐Current Ion Implanter
2008
Michiro Sugitani
Mitsukuni Tsukihara
Mitsuaki Kabasawa
Koji Ishikawa
Hiroki Murooka
Kazuyoshi Ueno
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Introducing the LEX/LEX3, new low energy high current implanters
2002
M. Tsukihara
Michiro Sugitani
M. Kabasawa
Hiroki Murooka
Junichi Murakami
Yoshitomo Hidaka
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A versatile two-dimensional backgammon-drift chamber for transmission trajectory counter
1995
S. Budihardjo
Hajime Fujimura
Hiroki Murooka
Akihiro Notomi
Yusuke Uozumi
Takeji Sakae
Masaru Matoba
fuzimura iti
situoka hiroki
noutomi akihiro
uozumi yuusuke
sakae takezi
matoba yuu
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