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Yoshitomo Hidaka
Yoshitomo Hidaka
Ion beam
Ion implantation
Materials science
Actuator
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3
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3
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0
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2024
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A method of controlling a processing base
2005
Keiji Okada
Michiro Sugitani
Yoshitomo Hidaka
Junichi Murakami
Fumiaki Sato
Mitsukuni Tsukihara
Suguru Hirokawa
Masamitsu Shinozuka
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Introducing the LEX/LEX3, new low energy high current implanters
2002
M. Tsukihara
Michiro Sugitani
M. Kabasawa
Hiroki Murooka
Junichi Murakami
Yoshitomo Hidaka
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Energy contamination control system in deceleration beam line
2000
H. Muroaka
M. Tsukihara
M. Kabasawa
Michiro Sugitani
Yoshitomo Hidaka
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