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Pandeng Xuan
Pandeng Xuan
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Computer science
Electronic engineering
Metrology
Robustness (computer science)
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An Innovative Graphical Platform for Real Time Accurate AEI Overlay Prediction and Rework Control
2021
CSTIC | China Semiconductor Technology International Conference
Yaobin Feng
Jianfeng Li
Alex Wang
Xue Huang
Senmao Zeng
Nick Lu
Dean Wu
Pandeng Xuan
Yang Kuang
Ningqi Zhu
Erik Xiao
Mi Zhang
Jin Zhu
Jason Pei
Kevin Huang
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An accurate and robust after-develop overlay measurement solution using YieldStar multi-wavelength optical metrology accompanied by a precise application strategy
2021
Pengzhen Zhang
Kai-you
Pandeng Xuan
Yaobin Feng
Longfei Shen
Jolly Xu
Ji-Ling Hou
Saravana Prakash Shanmugasundaram
Summer Sui
Shiwei Ren
Chengkun Li
Jerry Fang
Toby Yu
Babak Mozooni
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Fast in-device overlay metrology on multi-tier 3DNAND devices without DECAP and it’s applications in process characterization and control
2021
Yaobin Feng
Pandeng Xuan
Dean Wu
Bruce Yang
Craig Xu
Neo Liu
Pavel Izikson
Huanian You
Xi-Zhi Yan
Vladimir Markov
Yvon Chai
Chaoyu Chen
Bert Verstraeten
Amy Wang
Gonzalo Sanguinetti
Giacomo Miceli
Jelmer Boter
Vidar van der Meijden
Hua Li
Babak Mozooni
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Novel Target Design for Thick Resist Layers Overlay Measurement Improvement
2020
Chao Fang
Jinyu Qiu
Pandeng Xuan
Yaobin Feng
Lingyi Guo
Jiahui He
Jincheng Pei
Gang Xu
Jin Zhu
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A novel accurate and robust technique in after-etch overlay metrology of 3D-NAND’s memory holes
2020
Yaobin Feng
Dean Wu
Pandeng Xuan
Pavel Izikson
Payne Qi
Huanian You
Yvon Chai
Jan Jitse Venselaar
Giulio Bottegal
Gonzalo Sanguinetti
Bert Verstraeten
Tjitte Nooitgedagt
Babak Mozooni
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