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Jolly Xu
Jolly Xu
ASML Holding
Throughput
Electronic engineering
Overlay
Metrology
Diffraction
2
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2024
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An accurate and robust after-develop overlay measurement solution using YieldStar multi-wavelength optical metrology accompanied by a precise application strategy
2021
Pengzhen Zhang
Kai-you
Pandeng Xuan
Yaobin Feng
Longfei Shen
Jolly Xu
Ji-Ling Hou
Saravana Prakash Shanmugasundaram
Summer Sui
Shiwei Ren
Chengkun Li
Jerry Fang
Toby Yu
Babak Mozooni
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Enhancing the applications space of diffraction based overlay metrology by increasing throughput and target pitch flexibility
2020
Simon Gijsbert Josephus Mathijssen
Herman Heijmerikx
Farzad Farhadzadeh
Marc Noot
Lineke van der Sneppen
Longfei Shen
Fei Jia
Jolly Xu
Huajun Qin
Arie Jeffrey Den Boef
Elliott McNamara
Kaustuve Bhattacharyya
Chao Fang
Yaobin Feng
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