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Vidar van der Meijden
Vidar van der Meijden
ASML Holding
Computer science
Metrology
Overlay
Electronic engineering
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4
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1
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Improved control of multi-layer overlay in advanced 8nm logic nodes
2018
Tae-Sun Kim
Young-Sik Park
Yong-Chul Kim
Byoung-Hoon Kim
Ji-Hun Lee
Min-Keun Kwak
Sung-Won Choi
Joon-Soo Park
Hong-Cheon Yang
Philipp Meixner
Dong-jin Lee
Oh-Sung Kwon
Hyun-Su Kim
Jin-Tae Park
Sung-Min Lee
Cedric Desire Grouwstra
Vidar van der Meijden
Mohamed El Kodadi
Chris Kim
Pierre-Yves Guittet
Tjitte Nooitgedagt
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Scanner focus metrology and control system for advanced 10nm logic node
2018
Junghun Oh
Kwang-Seok Maeng
Jae-Hyung Shin
Won-woong Choi
Sung-Keun Won
Cedric Desire Grouwstra
Mohamed El Kodadi
Stephan Heil
Vidar van der Meijden
Jong Kyun Hong
Sang-Jin Kim
Oh-Sung Kwon
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