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Jan Jitse Venselaar
Jan Jitse Venselaar
ASML Holding
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Computer science
Robustness (computer science)
Computer hardware
optical metrology
2
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2024
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Enabling accurate and robust optical metrology of in device overlay
2020
Minseok Kang
Chan Hwang
Seung-yoon Lee
Jeongjin Lee
Joon-Soo Park
Christian Marinus Leewis
Eun-Ji Yang
Do-Haeng Lee
James Lee
Sabil Huda
Noh-Kyoung Park
Anagnostis Tsiatmas
Giulio Bottegal
Amy Wang
Filippo Belletti
Jan Jitse Venselaar
Giacomo Miceli
Izabela Saj
Sam Chen
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A novel accurate and robust technique in after-etch overlay metrology of 3D-NAND’s memory holes
2020
Yaobin Feng
Dean Wu
Pandeng Xuan
Pavel Izikson
Payne Qi
Huanian You
Yvon Chai
Jan Jitse Venselaar
Giulio Bottegal
Gonzalo Sanguinetti
Bert Verstraeten
Tjitte Nooitgedagt
Babak Mozooni
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