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Gerd Reisinger
Gerd Reisinger
Carl Zeiss AG
Performance art
Art
Humanities
Photolithography
Engineering drawing
4
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2
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0
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A process for patterning a substrate by multiple exposure
2005
Aksel Göhnermeier
Paul Gräupner
Manfred Maul
Gerd Reisinger
Martin Schriever
Ulrich Wegmann
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Systeme d'exposition par projection microlithographique, et procede d'introduction d'un fluide d'immersion dans une chambre d'immersion
2004
Bernhard Gellrich
Gerd Reisinger
Dieter Schmerek
Jens Kugler
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Mikrolithographische projektionsbelichtungsanlage sowie verfahren zum einbringen einer immersionsflüssigkeit in einem immersionsraum
2004
Bernhard Gellrich
Gerd Reisinger
Dieter Schmerek
Jens Kugler
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Printing 130-nm DRAM isolation pattern: Zernike correlation and tool improvement
2001
Jan van Schoot
Nakgeuon Seong
Bernd Geh
Martin Burkhardt
Paul Graeupner
Gerd Reisinger
Rian Rubingh
Manfred Suddendorf
Jo Finders
Erwin Rikkers
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