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Manfred Suddendorf
Manfred Suddendorf
ASML Holding
Engineering drawing
Lithography
Lens (optics)
Electronic engineering
Engineering
2
Papers
8
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Lithographic performance of a dual-stage 0.93NA ArF step and scan system
2005
Rian Rubingh
Marco Hugo Petrus Moers
Manfred Suddendorf
Peter Vanoppen
Aernout Kisteman
Michael Thier
Vladan Blahnik
Eckhard Piper
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Citations (6)
Printing 130-nm DRAM isolation pattern: Zernike correlation and tool improvement
2001
Jan van Schoot
Nakgeuon Seong
Bernd Geh
Martin Burkhardt
Paul Graeupner
Gerd Reisinger
Rian Rubingh
Manfred Suddendorf
Jo Finders
Erwin Rikkers
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Citations (2)
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