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A process for patterning a substrate by multiple exposure
A process for patterning a substrate by multiple exposure
2005
Aksel Göhnermeier
Paul Gräupner
Manfred Maul
Gerd Reisinger
Martin Schriever
Ulrich Wegmann
Keywords:
Multiple exposure
Substrate (chemistry)
Cell biology
Materials science
Biophysics
Chemistry
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