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George J. Collini
George J. Collini
IBM
Electronic engineering
X-ray lithography
Lithography
Wafer
IBM
2
Papers
4
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Fabrication of 64-Mb DRAM using x-ray lithography
1995
Ronald A. DellaGuardia
Chet Wasik
Denise M. Puisto
Robert H. Fair
Lars W. Liebmann
Janet M. Rocque
Steven C. Nash
Angela C. Lamberti
George J. Collini
R. French
Ben R. Vampatella
George G. Gifford
V. Nastasi
Phil Sa
F. Volkringer
Thomas Zell
David E. Seeger
John Michael Warlaumont
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Laser-ablated resist via inspection
1990
Charles E. Benjamin
George J. Collini
Ricardo A. Martinez
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