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Thomas Zell
Thomas Zell
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X-ray lithography
Lithography
Electronic engineering
Stepper
Materials science
3
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27
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Fabrication of 64-Mb DRAM using x-ray lithography
1995
Ronald A. DellaGuardia
Chet Wasik
Denise M. Puisto
Robert H. Fair
Lars W. Liebmann
Janet M. Rocque
Steven C. Nash
Angela C. Lamberti
George J. Collini
R. French
Ben R. Vampatella
George G. Gifford
V. Nastasi
Phil Sa
F. Volkringer
Thomas Zell
David E. Seeger
John Michael Warlaumont
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Citations (4)
Optical proximity correction: a first look at manufacturability
1994
Lars W. Liebmann
Brian J. Grenon
Mark A. Lavin
Stephen Schomody
Thomas Zell
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Citations (20)
Comparison of image shortening effects in x‐ray and optical lithography
1994
Journal of Vacuum Science & Technology B
R. Dellaguardia
Juan R. Maldonado
F. Prein
Thomas Zell
A Kluwe
H. K. Oertel
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Citations (3)
1