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Kai Ma
Kai Ma
Applied Materials
Materials science
Rapid thermal processing
Physics
Humanities
Analytical chemistry
5
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5
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Appareil et procédé d'alignement et de positionnement d'un substrat froid sur une surface chaude
2009
Blake Koelmel
Abhilash J. Mayur
Kai Ma
Alexander N. Lerner
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Quality and reliability of oxide by low thermal budget rapid thermal oxidation
2008
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Yonah Cho
Yoshitaka Yokota
C. Olsen
Agus Tjandra
Kai Ma
Vicky Nguyen
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Characterization of Nickel Silicides Produced by Millisecond Anneals
2007
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Bruce E. Adams
Dean Jennings
Kai Ma
Abhilash J. Mayur
S. Moffatt
Stephen G Nagy
Vijay Parihar
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Traitement d'un substrat semiconducteur au moyen d'un disque dur contenant du carbone depose a basse temperature
2006
Kartik Ramaswamy
Hiroji Hanawa
Biagio Gallo
Kenneth S Collins
Kai Ma
Vijay Parihar
Dean Jennings
Abhilash J. Mayur
Amir Al-Bayati
Andrew Nguyen
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High Productivity Single Wafer Radical Oxidation System
2005
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Yoshitaka Yokota
Agus Tjandra
Kai Ma
M. Sanaka
Kirk Moritz
R. S. Sharma
H. Forstner
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