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Yoshitaka Yokota
Yoshitaka Yokota
Applied Materials
Materials science
Chemistry
Analytical chemistry
Thermal oxidation
Oxide
7
Papers
5
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0
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Procédé et appareil de nitruration sélective en une seule étape
2011
Udayan Ganguly
Theresa Kramer Guarini
Matthew Scott Rogers
Yoshitaka Yokota
Johanes Swenberg
Malcolm J. Bevan
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Quality and reliability of oxide by low thermal budget rapid thermal oxidation
2008
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Yonah Cho
Yoshitaka Yokota
C. Olsen
Agus Tjandra
Kai Ma
Vicky Nguyen
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Enabling single-wafer low temperature radical oxidation
2005
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Yoshitaka Yokota
Sundar Ramamurthy
Kunihiko Koike
Koichi Izumi
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High Productivity Single Wafer Radical Oxidation System
2005
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Yoshitaka Yokota
Agus Tjandra
Kai Ma
M. Sanaka
Kirk Moritz
R. S. Sharma
H. Forstner
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