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Kirk Moritz
Kirk Moritz
Materials science
Manufacturing engineering
Analytical chemistry
Nanotechnology
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High Productivity Single Wafer Radical Oxidation System
2005
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Yoshitaka Yokota
Agus Tjandra
Kai Ma
M. Sanaka
Kirk Moritz
R. S. Sharma
H. Forstner
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