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Greg Smith
Greg Smith
STMicroelectronics
Sputtering
Electronic engineering
Materials science
Ion plating
Sputter deposition
2
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Plasma charging effects on device degradation from via sputter etch
1995
Lakshmanna Vishnubhotla
Jamin Michael Ling
Jimmy Huang
Yujen Wu
Greg Smith
Mehdi Zamanian
Fu-Tai Liou
Kaihan A. Ashtiani
M. D. Mc Nicholas
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Improved aluminum plug process for submicron via filling
1994
Hong Yang
Yih-Shung Lin
Loc Nguyen
De-Dui Liao
J. Worley
Greg Smith
Fu-Tai Liou
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