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Jimmy Huang
Jimmy Huang
STMicroelectronics
Sputtering
CMOS
Instability
Inductively coupled plasma
Gate oxide
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Plasma charging effects on device degradation from via sputter etch
1995
Lakshmanna Vishnubhotla
Jamin Michael Ling
Jimmy Huang
Yujen Wu
Greg Smith
Mehdi Zamanian
Fu-Tai Liou
Kaihan A. Ashtiani
M. D. Mc Nicholas
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