Old Web
English
Sign In
Acemap
>
authorDetail
>
Yuji Yoneoka
Yuji Yoneoka
Hitachi
Sputtering
In situ
Very-large-scale integration
Optical engineering
Process engineering
5
Papers
6
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (5)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
In-situ process monitoring in metal deposition processes
1995
Shigeru Kobayashi
Eisuke Nishitani
Hideaki Shimamura
Akira Yajima
Satoshi Kishimoto
Yuji Yoneoka
Hiroyuki Uchida
Natsuyo Morioka
Show All
Source
Cite
Save
Citations (0)
In-situ process monitoring in metal deposition processes
1995
Shigeru Kobayashi
Eisuke Nishitani
Hideaki Shimamura
Akira Yajima
Satoshi Kishimoto
Yuji Yoneoka
Hiroyuki Uchida
Natsuyo Morioka
Show All
Source
Cite
Save
Citations (2)
In-situ process monitoring in metal deposition processes
1995
Shigeru Kobayashi
Eisuke Nishitani
Hideaki Shimamura
Akira Yajima
Satoshi Kishimoto
Yuji Yoneoka
Hiroyuki Uchida
Natsuyo Morioka
Show All
Source
Cite
Save
Citations (0)
Microstructure of sputter‐deposited Al–Cu–Si films
1991
Journal of Vacuum Science and Technology
Hideaki Shimamura
Akira Yajima
Yuji Yoneoka
Shigeru Kobayashi
Show All
Source
Cite
Save
Citations (4)
Appareil de traitement sous vide et procede de formation de pellicules utilisant ledit appareil
1990
Akira Okamoto
Shigeru Kobayashi
Hideaki Shimamura
Susumu Tsuzuku
Eisuke Nishitani
Satoshi Kishimoto
Yuji Yoneoka
Show All
Source
Cite
Save
Citations (0)
1