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Akira Yajima
Akira Yajima
Hitachi
Sputtering
In situ
Very-large-scale integration
Engineering
Optical engineering
5
Papers
6
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In-situ process monitoring in metal deposition processes
1995
Shigeru Kobayashi
Eisuke Nishitani
Hideaki Shimamura
Akira Yajima
Satoshi Kishimoto
Yuji Yoneoka
Hiroyuki Uchida
Natsuyo Morioka
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In-situ process monitoring in metal deposition processes
1995
Shigeru Kobayashi
Eisuke Nishitani
Hideaki Shimamura
Akira Yajima
Satoshi Kishimoto
Yuji Yoneoka
Hiroyuki Uchida
Natsuyo Morioka
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In-situ process monitoring in metal deposition processes
1995
Shigeru Kobayashi
Eisuke Nishitani
Hideaki Shimamura
Akira Yajima
Satoshi Kishimoto
Yuji Yoneoka
Hiroyuki Uchida
Natsuyo Morioka
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Microstructure of sputter‐deposited Al–Cu–Si films
1991
Journal of Vacuum Science and Technology
Hideaki Shimamura
Akira Yajima
Yuji Yoneoka
Shigeru Kobayashi
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Citations (4)
ALUMINUM BIAS SPUTTERING FOR FILM COVERAGE IMPROVEMENT
1989
CAD | International Conference on VLSI and CAD
Shigeru Kobayashi
Hideaki Shimamura
Masao Sakata
Shouyou Fujita
Akira Yajima
Hiroshi Saito
Hideki Tateishi
Shinji Sasaki
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