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Shingo Narimatsu
Shingo Narimatsu
Doping
Materials science
Phosphorus
Silicon
impurity effect
4
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2024
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Formation mechanism of the as-grown SiP in CZ-Si crystals with heavily doped phosphorus
2020
The Japan Society of Applied Physics
Kozo Nakamura
Takeshi Senda
Shingo Narimatsu
Susumu Maeda
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Formation behavior of SiP precipitates in CZ-Si crystals with heavily doped phosphorus
2020
The Japan Society of Applied Physics
Takeshi Senda
Shingo Narimatsu
Yoshiaki Abe
Susumu Maeda
Hisashi Matsumura
Takashi Isikawa
Kozo Nakamura
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Point defect reaction in the heavily doped n type CZ-Si during crystal growth process
2019
The Japan Society of Applied Physics
Kozo Nakamura
Shingo Narimatsu
Takeshi Senda
Susumu Maeda
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Atomic structures of grown-in Si-P precipitates in red-phosphorus heavily doped CZ-Si crystals
2017
The Japan Society of Applied Physics
Takeshi Senda
Takashi Ishikawa
Hiroyuki Fujimori
Hisashi Matsumura
Shingo Narimatsu
Yoshiaki Abe
Tomoyuki Horikawa
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