Old Web
English
Sign In
Acemap
>
Paper
>
Formation mechanism of the as-grown SiP in CZ-Si crystals with heavily doped phosphorus
Formation mechanism of the as-grown SiP in CZ-Si crystals with heavily doped phosphorus
2020
Kozo Nakamura
Takeshi Senda
Shingo Narimatsu
Susumu Maeda
Keywords:
Materials science
Doping
Phosphorus
impurity effect
Chemical engineering
mechanism
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]